This historically significant textbook was the first ever written devoted exclusively to the semiconductor physics and advanced fabrication technology associated with metal-oxide-semiconductor (MOS) field-effect devices. It detailed all the basic theory needed to understand MOS field-effect transistors (MOSFETs) and MOS integrated circuits, as well as providing insight into changes that could improve electrical performance and eventually lead to the much smaller and faster MOS device structures that would come in the future. For many years, it was used as an important textbook in the engineering and physics departments in colleges and universities all around the world.